JKL PVD coating basic process

(1) Pre-PVD treatment, including cleaning of items and pre-treatment. Specific cleaning methods include detergent cleaning, chemical solvent cleaning, ultrasonic cleaning, and ion bombardment cleaning.
(2) Put them into furnace, including vacuum chamber cleaning and fixtures, and the installation, commissioning and connection of items and fixtures.
(3) Vacuuming, generally pumping to 6.6Pa or more, open the front of the diffusion pump earlier to maintain the vacuum pump and heat the diffusion pump. After preheating is sufficient, the high valve is opened and pumped to a 6 x 10-3 Pa half bottom vacuum with a diffusion pump.
(4) Baking, baking the items to the desired temperature.
(5) Ion bombardment, the vacuum is generally 10 Pa to 10-1 Pa, the ion bombardment voltage is a negative high voltage of 200 V to 1 KV, and the attack time is 15 min to 30 min.
(6) Pre-melting, adjusting the current to pre-melt the material, adjusting the current to pre-melt the plating and degassing for 1min ~ 2min. Evaporating deposition. The evaporation current is adjusted as required until the desired deposition time is over.  Cooling, the items are cooled to a certain temperature in the vacuum chamber.
(7) After the items is taken out, the vacuum chamber is closed, the vacuum is evacuated to l × l0-1Pa, and the diffusion pump is cooled to the allowable temperature before the maintenance pump and the cooling water can be turned off.
 


Post time: Sep-07-2021